Patent attributes
An actuator includes: a mass portion; a vibrating part having a pair of elastic portions supporting the mass portion; at least one pair of beam portions supporting the vibrating part; a piezoelectric element bonded on each of the beam portions; voltage applying means that applies voltage to each of the piezoelectric elements so that each of the beam portions is bended to be deformed so as to drive the vibrating part, in which the voltage applying means includes: a first voltage generating part that generates first voltage periodically changing with a first frequency; a second voltage generating part that generates second voltage periodically changing with a second frequency different from the first frequency; and a voltage superimposing part that superimposes the first voltage and the second voltage, and in which the voltage superimposed at the voltage superimposing part is applied to each of the piezoelectric elements to allow the mass portion to rotate about the first axis extending along the pair of elastic portions with the first frequency while rotating about the second axis intersecting with the first axis with the second frequency.
