US Patent 7511282 Sample preparation

Patent 7511282 was granted and assigned to FEI Company on March, 2009 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

FEI Company

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7511282

Date of Patent

March 31, 2009

Patent Application Number

11440799

Date Filed

May 25, 2006

Patent Primary Examiner

Jack I. Berman

Patent abstract

Methods of extracting a TEM sample from a substrate include milling a hole on the sample and inserting a probe into the hole. The sample adheres to the probe, and can be processed on transferred while on the probe. In another embodiment, the sample is freed from a substrate and adheres to a probe by electrostatic attraction. The sample is placed onto a TEM sample holder in a vacuum chamber.