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US Patent 7509717 Method of production of multilayer ceramic electronic device

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Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7509717
Date of Patent
March 31, 2009
Patent Application Number
11386666
Date Filed
March 23, 2006
Patent Primary Examiner
‌
Minh Trinh
Patent abstract

A method of production of a multilayer ceramic electronic device having dielectric layers with an interlayer thickness of 5 μm or less and internal electrode layers including a base metal, including the steps of firing, then annealing a stack comprised of a dielectric layer paste and an internal electrode layer paste including a base metal alternately arranged in 100 layers or more under a reducing atmosphere, treating the annealed stack by first heat treatment under a strong reducing atmosphere of an oxygen partial pressure P3 of over 2.9×10−39 Pa to less than 6.7×10−24 Pa at a holding temperature T3 of over 300° C. to less than 600° C. The stack after the first heat treatment is treated by second heat treatment under an atmosphere of an oxygen partial pressure P4 of over 1.9×10−7 Pa to less than 4.1×10−3 Pa at a holding temperature T4 of over 500° C. to less than 1000° C.

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