Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Keiji Emoto0
Atsushi Ito0
Date of Patent
March 24, 2009
0Patent Application Number
108790740
Date Filed
June 30, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A stage system includes a fine-motion stage on which a substrate holding member for holding a substrate is mounted, a rough-motion stage on which the fine-motion stage is mounted, a stage for supporting and moving a substrate, and a probe configured to measure a potential of the substrate without contact thereto, the probe being supported by the rough-motion stage so as to be opposed to one of a bottom face and a side face of the substrate.
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