US Patent 7508561 Deformable mirrors

A deformable mirror (DM) embodying the invention includes a reflective layer attached to the front surface of a solid monolithic block of a ceramic material. A plurality of holes is drilled from the back surface with the top end of each hole being terminated a predetermined distance below the front surface. Conductors, functioning as actuators, are inserted into each hole to apply a localized electric field at the top end of the hole. Each one of the electric fields is used to create local deformation of the front surface of the block and the corresponding portion of the reflective layer.