Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Eric J. Li0
Tian-An Chen0
Daoqiang Lu0
Date of Patent
March 17, 2009
0Patent Application Number
112303670
Date Filed
September 19, 2005
0Patent Primary Examiner
Patent abstract
Methods of forming a microelectronic structure are described. Embodiments of those methods include forming a conformal layer of a water soluble nanopowder on a wafer, and then scribing the wafer.
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