Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 17, 2009
Patent Application Number
10597432
Date Filed
January 30, 2004
Patent Primary Examiner
Patent abstract
A trench capacitor is filled with a set of two or more storage plates by consecutively depositing layers of dielectric and conductor and making contact to the ground plates by etching an aperture through the plates to the buried plate in the substrate and connecting the one or more ground plate to the substrate; the charge storage plates are connected at the top of the capacitor by blocking the end of the first plate during the formation of the second ground plate and exposing the material of the first storage plate during deposition of the second storage plate.
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