Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 10, 2009
Patent Application Number
11205376
Date Filed
August 17, 2005
Patent Primary Examiner
Patent abstract
Semiconductor devices to reduce stress on a metal interconnect are disclosed. A disclosed semiconductor device comprises: a semiconductor substrate; an uppermost metal interconnect formed on the semiconductor substrate; an oxide layer formed on the substrate and the uppermost metal interconnect; an aluminum layer formed on the oxide layer; and a stress-relief layer formed on the aluminum layer to thereby prevent cracking of the passivation layer during a subsequent packaging process, to increase reliability of the passivation layer, and to prevent degradation of properties of the semiconductor device.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.