Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hironari Mori0
Date of Patent
March 10, 2009
0Patent Application Number
118788520
Date Filed
July 27, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The piezo-resistance type triaxial acceleration sensor includes a frame section, a mass section disposed in the frame section, beam elements which flexibly support the mass section, and piezo-resistors for X, Y and Z axes of the frame section, formed on the beam elements. The length of the Z-axis piezo-resistors is longer than the length of the X-axis piezo-resistors and the Y-axis piezo-resistors, so as to decrease the sensitivity.
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