Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 3, 2009
Patent Application Number
11499947
Date Filed
August 7, 2006
Patent Primary Examiner
Patent abstract
A method for forming a through electrode is disclosed. The through electrode integrally comprises a columnar electrode filling a through hole, a lower end electrode pad formed on a lower end side of a columnar electrode and having an area wider than the cross section of the through hole, and an upper end electrode pad formed on an upper end side of the columnar electrode and having an area wider than the cross section of the through hole. The lower end electrode pad is arranged is arranged to occlude a lower end opening of the through hole. The columnar electrode fills the through hole by laminating copper on the lower end electrode pad.
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