Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 24, 2009
Patent Application Number
11195864
Date Filed
August 3, 2005
Patent Primary Examiner
Patent abstract
A second substrate, e.g. a III/V compound semiconductor, is placed on a first substrate, e.g. a wafer, in the vicinity of placement marks on the first substrate. The second substrate is exposed to patterned radiation, e.g. for the manufacture of integrated circuits.
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