Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert William Tait0
Russell Stephen DeMuth0
Kevin George Harding0
Date of Patent
February 17, 2009
0Patent Application Number
112571820
Date Filed
October 24, 2005
0Patent Primary Examiner
Patent abstract
A method for inspecting an object using a light measurement system that includes a light source and an imaging sensor. The method includes emitting light from the light source, dispersing light emitted from the light source into one of a diffraction pattern and an interference pattern, and imaging the patterned light onto the object using a lens.
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