Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Marcel Mathijs Theodore Marie Dierichs0
Johannes Catharinus Hubertus Mulkens0
Date of Patent
February 17, 2009
0Patent Application Number
110229350
Date Filed
December 28, 2004
0Patent Primary Examiner
Patent abstract
In immersion lithography, to avoid internal reflections in the final element of the projection system, immersion fluid and topcoat, the thicknesses, dl, dtc and dr, and refractive indices, nl, ntc and nr, of the immersion fluid, topcoat and resist may meet the following criteria:nl≦ntc≦nr dl>˜5.λdtc≦˜5.λ
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