Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 10, 2009
Patent Application Number
11391066
Date Filed
March 28, 2006
Patent Primary Examiner
Patent abstract
An apparatus for inspecting a disk-like object comprising at least one first module for inspecting a surface of the disk-like object and at least one second module insertable in the apparatus. The at least one second module is arranged to inspect a different element of the disk-like object than the surface of the disk-like object.
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