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US Patent 7488070 Optical measuring system and optical measuring method

Patent 7488070 was granted and assigned to Carl Zeiss AG on February, 2009 by the United States Patent and Trademark Office.

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Patent
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Patent attributes

Current Assignee
Carl Zeiss AG
Carl Zeiss AG
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
74880700
Patent Inventor Names
Peter Reimer0
Christoph Hauger0
Date of Patent
February 10, 2009
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Patent Application Number
114720300
Date Filed
June 21, 2006
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Patent Primary Examiner
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Ricky L. Mack
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Patent abstract

An optical measuring system, including at least one radiation source; a first beam splitter; a second beam splitter; an OCT detector; a wavefront detector which is different from the OCT detector; at least one active optical element; and a collimator. The radiation source, the first beam splitter, the second beam splitter, the OCT detector, the wavefront detector, the at least one active optical element, and the collimator are arranged such that a source beam generated by the at least one radiation source is divided into an object illuminating beam and a reference beam by the first beam splitter; the object illuminating beam is directed by the collimator to an object position via the at least one active optical element; radiation emanating from the object position is formed to an object measuring beam by at least the collimator; the object measuring beam is directed to the second beam splitter via the at least one active optical element; the object measuring beam is divided into an OCT measuring beam and a wavefront measuring beam by the second beam splitter; the wavefront measuring beam is directed to the wavefront detector; the OCT measuring beam is directed to the OCT detector; and the reference beam is directed to the OCT detector.

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