Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shifang Zhou0
Michael J. Foster0
Date of Patent
February 10, 2009
Patent Application Number
11610050
Date Filed
December 13, 2006
Patent Primary Examiner
Patent abstract
A microelectromechanical system (MEMS) device with a mechanism layer and a base. The top surface of the base is bonded to the mechanism layer and defines a gap in the top surface of the base. A portion of the mechanism layer is deflected into the gap until it contacts the base, and is bonded to the base.
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