US Patent 7485874 Apparatus for manufacturing semiconductor substrates
Patent 7485874 was granted and assigned to SUMCO on February, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 24, 2006
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Date of Patent
February 3, 2009
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Patent Application Number
11510277
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Patent Inventor Names
Yoichi Kurosawa
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Seiichi Nakamura
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Tomoji Watanabe
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Tsuneo Hayashi
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Akira Bando
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Hideki Nishihata
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Kazunori Tsubuku
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Kazuo Mera
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Nobuo Tsumaki
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Riyuusuke Kasamatsu
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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