Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kiyoshi Nikawa0
Date of Patent
February 3, 2009
Patent Application Number
11447891
Date Filed
June 7, 2006
Patent Primary Examiner
Patent abstract
To detect a defect without being limited to the current path of a sample. The presence or absence of a defect in a sample is detected by allowing said sample to stand for a predetermined period of time after heating said sample with a heat source and by observing the temperature distribution formed on said sample by an observation unit.
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