Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takashi Sumigawa0
Hiroyuki Ohta0
Date of Patent
February 3, 2009
0Patent Application Number
113501090
Date Filed
February 9, 2006
0Patent Primary Examiner
Patent abstract
A mechanical-quantity measuring device capable of measuring a strain component of structure deformation for an object to be measured in a particular desired direction with long life, high reliability and high precision. A strain sensor is formed on a semiconductor substrate. Impurity-diffused layers considering the crystal orientation of the semiconductor single crystalline substrate are used to form a Wheatstone bridge circuit on the substrate. The Wheatstone bridge circuit can operate on one substrate since the semiconductor single crystal has the anisotropy of piezoresistance effect.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
