Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shahin Zangooie0
Lin Zhou0
Roger M. Young0
Ronald D. Fiege0
Clemente Bottini0
Date of Patent
January 13, 2009
0Patent Application Number
118286660
Date Filed
July 26, 2007
0Patent Primary Examiner
Patent abstract
A method, system and computer program product for determining a geometric parameter of an optical spot of a light beam are disclosed. A method comprises: providing a calibration target, the calibration target including a systematic variation in a parameter; measuring the calibration target with respect to the systematic variation using the light beam to obtain a plurality of measurements; and analyzing the measurements and the systematic variation to determine the geometric parameter of the optical spot.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
