Patent attributes
Disclosed is an X-ray apparatus having an X-ray source, an X-ray detector, a divergence slit, and a scattering slit. The incident angle θ of X-ray to be irradiated on a sample is changed at a predetermined angular speed at measurement time and diffracted X-ray detection angle 2θ at which the X-ray detector detects X-ray is changed in the opposite direction to the θ-direction at an angular speed double that of the X-ray incident angle θ. The slit width of the divergence slit is changed such that the X-ray irradiation width always coincides with the sample width while the slit width of the scattering slit is retained at a constant value. The width of X-ray received by the X-ray detector is restricted by the narrower one of the divergence slit and the scattering slit. The resolution in the high angle region can be kept at a high level.
