A temperature compensated self-refresh circuit maintains a stable current characteristic by maintaining a predetermined self-refresh cycle to cope with a process skew and a voltage change in a low power consumption memory product and by changing the self-refresh cycle only depending on temperature change. The temperature compensated self-refresh circuit is provided with a reference voltage generating unit adapted and configured to use an internal power voltage of a Widlar type so as to reduce a process skew and to have NMOS transistors with a LVT (Low Voltage Transistor) structure so as to have the same voltage as that of a temperature sense unit, thereby maintaining a predetermined cycle of an oscillating signal coping with the process skew.