Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Patrick D. Duane0
Yacov Elgar0
William Eckes0
Rushford Ogden0
Date of Patent
December 30, 2008
0Patent Application Number
115371630
Date Filed
September 29, 2006
0Patent Primary Examiner
Patent abstract
Embodiments of the invention generally provide a substrate support assembly. In one embodiment, a substrate support assembly includes a substrate support plate, a thermal regulating plate coupled in a spaced-apart relation to the substrate support plate and a main actuator coupled in a spaced-apart relation to the thermal regulating plate. The main actuator is adapted to move the substrate support plate laterally. The substrate support assembly is configured to limit the thermal influence of the main actuator on a substrate positioned on the substrate support plate.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
