Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takuji Maruta0
Hiroshi Tanaka0
Date of Patent
December 16, 2008
Patent Application Number
11304647
Date Filed
December 16, 2005
Patent Primary Examiner
Patent abstract
A position detection method of detecting a position of a detection mark. The method includes a matching step of calculating a value of a correlation using a template for an image including the detection mark, a change step of changing the template to be used for the correlation, a repeat step of, when a value of a correlation in the matching step is not more than a predetermined value, changing the matching processing while changing the template in the change step, and a step of performing position detection on the basis of a result of correlation in the matching step or the repeat step.
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