Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert Clayton Wheland0
Roger Harquail French0
Date of Patent
December 16, 2008
0Patent Application Number
110744400
Date Filed
March 8, 2005
0Patent Primary Examiner
Patent abstract
The present invention is drawn to liquid perfluoro-n-alkanes that are highly transparent to UV wavelengths ranging from about 150 nm to 165 nm, and to the method by which high transparency may be obtained. The liquid perfluoro-n-alkanes of the invention are useful in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography at 157 nm exposure wavelength.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
