Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toru Takizawa0
Date of Patent
December 9, 2008
0Patent Application Number
113764350
Date Filed
March 16, 2006
0Patent Primary Examiner
Patent abstract
A weight part (12) is supported by a beam part (26) in a slim piece shape supported by a frame-shaped support part (10), and the beam part (26) is provided with a piezoresistance element (20) as a transducing element that transduces a mechanical variation to an electrical variation, so that a mechanical variation of the weight part (12) is transmitted to the piezoresistance element (20) via the beam part (26). Then, the beam part (26) is constructed by stacking the silicon nitride film (16) and a resin film (18) such as a polyimide film.
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