Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kwan Yul Lee0
Date of Patent
November 25, 2008
0Patent Application Number
116113940
Date Filed
December 15, 2006
0Patent Primary Examiner
Patent abstract
A method of manufacturing an image sensor using a microlens mold is provided. The method includes: forming an interlayer dielectric layer on a semiconductor substrate having photodiodes; forming color filter layers on the interlayer dielectric layer; forming a planarization layer on the color filter layers; coating photoresist on the planarization layer; aligning a mold having a lens shaped pattern on the semiconductor substrate with the photoresist applied thereon; pressing the mold and the semiconductor substrate closely to each other such that a pattern formed in the mold is transferred onto the photoresist; and separating the mold from the semiconductor substrate, thereby forming micro-lenses.
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