Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chia-Lin Chen0
Sheng-Hui Liang0
Pei-Chun Liao0
Chin-Yuan Ko0
Date of Patent
November 18, 2008
0Patent Application Number
118963640
Date Filed
August 31, 2007
0Patent Primary Examiner
Patent abstract
A method for testing a batch of semiconductor devices in wafer level is provided. The method includes the following steps: (a) obtaining a breakdown voltage of gate dielectric of each semiconductor device; (b) applying, to the gate dielectric of each semiconductor device, a stress voltage below the breakdown voltage but above a base voltage of gate dielectric of the semiconductor devices; (c) after the step (b), measuring currents of gate dielectric of each semiconductor devices at the base voltage; and (d) obtaining a tailing distribution from the measured currents.
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