US Patent 7453059 Technique for monitoring and controlling a plasma process

Patent 7453059 was granted and assigned to Varian Semiconductor Equipment Associates on November, 2008 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

Varian Semiconductor Equipment Associates

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

74530590

Patent Inventor Names

Vassilis Panayotis Vourloumis0

Ziwei Fang0

Bernard G. Lindsay0

Bon-Woong Koo0

Ludovic Godet0

Vikram Singh0

Date of Patent

November 18, 2008

Patent Application Number

116785240

Date Filed

February 23, 2007

Patent Citations Received

‌

US Patent 11996276 Ion collector for use in plasma systems

Patent Primary Examiner

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Bernard E Souw

Patent abstract

A time-of-flight ion sensor for monitoring ion species in a plasma includes a housing. A drift tube is positioned in the housing. An extractor electrode is positioned in the housing at a first end of the drift tube so as to attract ions from the plasma. A plurality of electrodes is positioned at a first end of the drift tube proximate to the extractor electrode. The plurality of electrodes is biased so as to cause at least a portion of the attracted ions to enter the drift tube and to drift towards a second end of the drift tube. An ion detector is positioned proximate to the second end of the drift tube. The ion detector detects arrival times associated with the at least the portion of the attracted ions.