Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tae-Hong Kim0
Chul-Ho Shin0
Date of Patent
November 18, 2008
0Patent Application Number
111911820
Date Filed
July 27, 2005
0Patent Primary Examiner
Patent abstract
Semiconductor devices and methods for manufacturing the same are disclosed. An example method includes loading a first substrate to be provided with an oxynitride layer along with a second substrate having a nitride layer in a boat, and forming the oxynitride layer on the first substrate by placing the boat into a furnace and thermally treating the boat under an oxygen atmosphere.
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