Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yukio Nishimura0
Hiroshi Yamaguchi0
Hiroyuki Ishii0
Kouichi Fujiwara0
Date of Patent
November 18, 2008
0Patent Application Number
105332540
Date Filed
November 4, 2003
0Patent Primary Examiner
Patent abstract
An acrylic copolymer having a specific structure and a radiation-sensitive resin composition comprising the acrylic copolymer having high transparency to radiation, excelling in basic properties as a resist such as sensitivity, resolution, dry etching resistance, and pattern shape, and, in particular, excelling in forming contact holes and lines-and-spaces.
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