Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Duane E. Meyer0
Blaine D. Johs0
Craig M. Herzinger0
Steven E. Green0
Date of Patent
November 11, 2008
0Patent Application Number
116331380
Date Filed
December 4, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
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