US Patent 7445422 Hybrid turbomolecular vacuum pumps

A hybrid turbomolecular vacuum pump includes a housing having an inlet port and an exhaust port, one or more axial flow stages located within the housing, each of the axial flow stages including a stator and an impeller, each having inclined blades, at least one additional vacuum pumping stage which is not an axial flow stage, the additional vacuum pumping stage being located within the housing and including a stator and an impeller, and a motor to rotate the impellers such that gas is pumped from the inlet port to the exhaust port. The vacuum pump does not include a molecular drag stage having a rotating cylindrical drum or a rotating disk with a flat pumping surface. The additional vacuum pumping stage may be a modified molecular drag stage, wherein the impeller includes a disk having a roughened or grooved pumping surface, and/or a regenerative stage.