US Patent 7440606 Defect detector and defect detection method

Patent 7440606 was granted and assigned to Dainippon Screen Mfg Co on October, 2008 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Dainippon Screen Mfg Co

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

74406060

Patent Inventor Names

Akio Sanda0

Date of Patent

October 21, 2008

Patent Application Number

109408450

Date Filed

September 15, 2004

Patent Primary Examiner

‌

Sheela C Chawan

Patent abstract

A control part of a defect detector is provided with a magnification operation part, an inspected image display part and a master image display part. The magnification operation part operates a display magnification α1 (display magnification data) for a defective area on the basis of defective information. An imaging part images inspected image data so that an imaging magnification β1 reaches the display magnification α1, and the inspected image display part displays the inspected image data on a detection monitor. The master image data display part operates a display magnification α2 for master image data to be substantially identical to the display magnification α1, and displays the master image data on the detection monitor at the display magnification α2. Thus, the efficiency in a defect detecting operation of an operator is improved.