US Patent 7440113 Littrow interferometer

Patent 7440113 was granted and assigned to Agilent Technologies on October, 2008 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Agilent Technologies

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7440113

Date of Patent

October 21, 2008

Patent Application Number

11316855

Date Filed

December 23, 2005

Patent Primary Examiner

‌

Patrick Connolly

Patent abstract

An apparatus and method for measuring displacement includes a light beam directed to an interferometer core that splits the light beam into first and second component beams. The first component beam is directed to a diffraction grating at approximately a Littrow angle. A diffraction is received by the interferometer core and is combined with the second component beam. The combination of the first and second component beams is measured to determine displacement of the diffraction grating.