Patent attributes
A six-axis force sensor includes a pair of members, and at least three legs scatteringly disposed between the pair of members on the periphery of the members. Each leg includes a T-shaped leg consisting of a cross beam supported at both ends thereof by one of the pair of members and extending on the periphery of the member in a circumferential direction, and a vertical beam extending from the center of the cross beam to a direction perpendicular to the cross beam and connected to the other of the pair of members. The strains on the legs are detected by first single-axis-type strain gauges and second single-axis-type strain gauges. A first single-axis-type strain gauge is attached to a surface of the cross beam facing the side opposite to the vertical beam or a surface of the cross beam facing the vertical beam, so as to be able to detect a strain generated in the cross beam in a longitudinal axis direction thereof, and a second single-axis-type strain gauge is attached to a side surface of the vertical beam facing in a circumferential direction, so as to be able to detect a strain generated in the vertical beam in a longitudinal axis direction thereof.