Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
October 14, 2008
Patent Application Number
11142423
Date Filed
June 1, 2005
Patent Primary Examiner
Patent abstract
A method for non-linearity compensating interferometer position data generated from a measurement signal includes generating a first set of non-linearity parameters based on received digital position values. The method includes sensing whether a low velocity condition exists. A first one of the non-linearity parameters is updated based on an estimated magnitude of the measurement signal if the low velocity condition exists. At least one digital position value is compensated based on the updated non-linearity parameter if the low velocity condition exists.
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