US Patent 7434589 Wafer cleaning apparatus with anticipating malfunction of pump
Is a
Date Filed
April 29, 2004
0
Date of Patent
October 14, 2008
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Patent Application Number
10834064
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Patent Inventor Names
Seung-kun Lee
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Jung-min Kim
0
Man-young Lee
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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