Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masayuki Wada0
Date of Patent
September 23, 2008
0Patent Application Number
114673160
Date Filed
August 25, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In an inventive resist removing method, sulfuric acid and hydrogen peroxide water are supplied to a surface of a substrate to remove a resist from the substrate surface. Thereafter, hydrogen peroxide water is supplied to the substrate surface to remove the sulfuric acid from the substrate surface.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
