US Patent 7422986 Deposition methods utilizing microwave excitation
Patent 7422986 was granted and assigned to Micron Technology on September, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 11, 2006
0
Date of Patent
September 9, 2008
0
Patent Application Number
11519430
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Patent Inventor Names
Ross S. Dando
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Craig M. Carpenter
0
Philip H. Campbell
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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