Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
September 9, 2008
Patent Application Number
10985839
Date Filed
November 10, 2004
Patent Citations Received
0
Patent Primary Examiner
Patent abstract
Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The system may include one or more vertically stacked load locks or vertically stacked process modules.
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