Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steve G. Gonzalez0
Ananda V. Mysore0
Date of Patent
September 9, 2008
Patent Application Number
11498832
Date Filed
August 4, 2006
Patent Primary Examiner
Patent abstract
A metrology system comprises a support structure, a fixture having a bottom surface resting on a surface of the support structure and moveable relative to the support structure, and a first measurement assembly for interacting with a workpiece held by the fixture to measure a characteristic of the workpiece. One of the bottom surface of the fixture and the surface of the support structure comprises sapphire, and the other of the bottom surface of the fixture and the surface of the support structure comprises a metal.
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