Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Peter J. Zdebel0
Gordon M. Grivna0
Date of Patent
September 2, 2008
0Patent Application Number
117696500
Date Filed
June 27, 2007
0Patent Primary Examiner
Patent abstract
In one embodiment, a pair of sidewall passivated trench contacts is formed in a substrate to provide electrical contact to a sub-surface feature. A doped region is diffused between the pair of sidewall passivated trenches to provide low resistance contacts.
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