US Patent 7416674 Method for fabricating micro optical elements using CMP

Patent 7416674 was granted and assigned to AXSUN Technologies on August, 2008 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

AXSUN Technologies

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

74166740

Patent Inventor Names

Jonathan R. Coppeta0

Date of Patent

August 26, 2008

Patent Application Number

100075020

Date Filed

November 8, 2001

Patent Primary Examiner

‌

Shamim Ahmed

Patent abstract

A technique for fabricating the required surface shapes for micro optical elements, such as curved micro mirrors and lenses, starts with a simple, binary for example, approximation to the desired surface shape. Then polishing, e.g., chemical mechanical polishing (CMP), is used to form the smooth optical surface. Specifically, starting with a mesa or blind hole, with a mesa profile, a smooth mirror or lens structure is fabricated.