Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sriram Ramamoorthi0
Alexander Govyandinov0
Date of Patent
August 19, 2008
0Patent Application Number
108782620
Date Filed
June 28, 2004
0Patent Primary Examiner
Patent abstract
A vacuum micropump for use in a sealed package includes at least one pumping cell and a magnetic field proximate to the pumping cell. The pumping cell has at least one anode, at least one dielectric in contact with the at least one anode, at least one titanium cathode in contact with the dielectric and an electric field between the at least one anode and the at least one cathode. The dielectric defines a space between the at least one anode and the at least one cathode. The vacuum micropump may be used to gauge pressure within the sealed package. An appropriate method of use is also provided.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
