US Patent 7411687 Speckle reduction method and system for EUV interferometry

Patent 7411687 was granted and assigned to ASML Holding on August, 2008 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

ASML Holding

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

74116870

Patent Inventor Names

Richard A. Gontin0

Yuli Vladimirsky0

Date of Patent

August 12, 2008

Patent Application Number

113913780

Date Filed

March 29, 2006

Patent Primary Examiner

‌

Patrick Connolly

Patent abstract

A wavefront measurement system has a source of electromagnetic radiation. An imaging system focuses the electromagnetic radiation at an object plane. A first grating is positioned in the object plane and has a plurality of rulings with randomized height. A stage moves the first grating parallel to the rulings. A projection optical system projects an image of the first grating onto an image plane. A second grating is at the image plane. A detector behind the second grating receives a fringe pattern produced by the second grating.