Patent attributes
An inspection system 1 includes an image pickup apparatus 2 for picking up an image of a defect, an inspection and classification apparatus 4 for performing inspection and automatic classification of defects, and a host computer 5. The host computer 5 performs learning for automatic classification at the inspection and classification apparatus 4. For creation of training data to be used for learning, defect images are arranged on a display of the host computer 5 on the basis of sizes of defects or imaging positions for picking up images of defects. A visual sign is provided to the defect image indicating a category assigned thereto. Further, in response to an operation by an operator, a statistical value of feature values of defect images included in a category, data obtained in inspection, images after being subjected to image processing, similar images or dissimilar images similar to or dissimilar to a defect image targeted for classification, an area directed to calculation of feature values in a defect image targeted for classification, and the like, are suitably displayed.
