US Patent 7407363 Substrate transport apparatus and substrate transport method

Patent 7407363 was granted and assigned to Dainippon Screen Mfg Co on August, 2008 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Dainippon Screen Mfg Co

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

74073630

Patent Inventor Names

Eiji Okuno0

Date of Patent

August 5, 2008

Patent Application Number

113917670

Date Filed

March 24, 2006

Patent Primary Examiner

‌

Donald Underwood

Patent abstract

A substrate transport apparatus includes a first substrate transport robot, a second substrate transport robot and a substrate transfer mechanism. The first substrate transport robot includes an upper hand and a lower hand vertically arranged. The second substrate transport robot includes an upper hand and a lower hand vertically arranged. The substrate transfer mechanism includes an upper hand and a lower hand vertically arranged and a hand driving mechanism adapted to perform hand opening and closing operations to vertically move the upper and lower hands.