US Patent 7406866 Micromachined devices

Patent 7406866 was granted and assigned to Analog Devices on August, 2008 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

Analog Devices

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

74068660

Date of Patent

August 5, 2008

Patent Application Number

111932460

Date Filed

July 29, 2005

Patent Primary Examiner

‌

John E. Chapman

Patent abstract

A micromachined device has a body suspended over a substrate and movable in a plane relative to the substrate. The body has a perimeter portion, a first cross-piece portion extending from one part of the perimeter portion to another part of the perimeter portion to define at least first and second apertures, a first plurality of fingers extending along parallel axes from the perimeter portion into the first aperture, and a second plurality of fingers extending along parallel axes from the perimeter portion into the second aperture.