Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasufumi Aihara0
Hideyoshi Tsuruta0
Keiji Kawasaki0
Date of Patent
July 22, 2008
0Patent Application Number
114495510
Date Filed
June 8, 2006
0Patent Primary Examiner
Patent abstract
An electrostatic chuck includes; a base made of ceramics, in which an electrode generating electrostatic attractive force is embedded; a cooling member which contains metal; a bonding material which bonds the base and the cooling member to each other; a gas providing passage which penetrates the base, the bonding material, and the cooling member; and an engagement member and a bolt member, which are fixing members mechanically fixing the base and the cooling member to each other.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
